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6H Or 4H SiC Substrate, N Type Or Semi-Insulating -Powerway Wafer

Categories SiC Wafer
Brand Name: PAM-XIAMEN
MOQ: 1-10,000pcs
Price: By Case
Payment Terms: T/T
Supply Ability: 10,000 wafers/month
Delivery Time: 5-50 working days
Place of Origin: China
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6H Or 4H SiC Substrate, N Type Or Semi-Insulating -Powerway Wafer

Product Description

PAM-XIAMEN offers semiconductor silicon carbide wafers,6H SiC and 4H SiC in different quality grades for researcher and industry manufacturers. We has developed SiC crystal growth technology and SiC crystal wafer processing technology,established a production line to manufacturer SiC substrate,Which is applied in GaN epitaxy device,power devices,high-temperature device and optoelectronic Devices. As a professional company invested by the leading manufacturers from the fields of advanced and high-tech material research and state institutes and China’s Semiconductor Lab,we are devoted to continuously improve the quality of currently substrates and develop large size substrates.

Here shows detail specification:

SILICON CARBIDE MATERIAL PROPERTIES

PolytypeSingle Crystal 4HSingle Crystal 6H
Lattice Parametersa=3.076 Åa=3.073 Å
c=10.053 Åc=15.117 Å
Stacking SequenceABCBABCACB
Band-gap3.26 eV3.03 eV
Density3.21 · 103 kg/m33.21 · 103 kg/m3
Therm. Expansion Coefficient4-5×10-6/K4-5×10-6/K
Refraction Indexno = 2.719no = 2.707
ne = 2.777ne = 2.755
Dielectric Constant9.69.66
Thermal Conductivity490 W/mK490 W/mK
Break-Down Electrical Field2-4 · 108 V/m2-4 · 108 V/m
Saturation Drift Velocity2.0 · 105 m/s2.0 · 105 m/s
Electron Mobility800 cm2/V·S400 cm2/V·S
hole Mobility115 cm2/V·S90 cm2/V·S
Mohs Hardness~9~9

6H N-TYPE SiC, 2″(50.8mm)WAFER SPECIFICATION

SUBSTRATE PROPERTYS6H-51-N-PWAM-250 S6H-51-N-PWAM-330 S6H-51-N-PWAM-430
DescriptionA/B Production Grade C/D Research Grade D Dummy Grade 6H SiC Substrate
Polytype6H
Diameter(50.8 ± 0.38) mm
Thickness(250 ± 25) μm (330 ± 25) μm (430 ± 25) μm
Carrier Typen-type
DopantNitrogen
Resistivity (RT)0.02 ~ 0.1 Ω·cm
Surface Roughness< 0.5 nm (Si-face CMP Epi-ready); <1 nm (C- face Optical polish)
FWHMA<30 arcsec B/C/D <50 arcsec
Micropipe DensityA+≤1cm-2 A≤10cm-2 B≤30cm-2 C≤50cm-2 D≤100cm-2
Surface Orientation
On axis<0001>± 0.5°
Off axis3.5° toward <11-20>± 0.5°
Primary flat orientationParallel {1-100} ± 5°
Primary flat length16.00 ± 1.70 mm
Secondary flat orientationSi-face:90° cw. from orientation flat ± 5°
C-face:90° ccw. from orientation flat ± 5°
Secondary flat length8.00 ± 1.70 mm
Surface FinishSingle or double face polished
PackagingSingle wafer box or multi wafer box
Usable area≥ 90 %
Edge exclusion1 mm

4H SEMI-INSULATING SiC, 2″(50.8mm)WAFER SPECIFICATION

(High-Purity Semi-Insulating(HPSI) SiC substrate is available)

SUBSTRATE PROPERTYS4H-51-SI-PWAM-250 S4H-51-SI-PWAM-330 S4H-51-SI-PWAM-430
DescriptionA/B Production Grade C/D Research Grade D Dummy Grade 4H SEMI Substrate
Polytype4H
Diameter(50.8 ± 0.38) mm
Thickness(250 ± 25) μm (330 ± 25) μm (430 ± 25) μm
Resistivity (RT)>1E5 Ω·cm
Surface Roughness< 0.5 nm (Si-face CMP Epi-ready); <1 nm (C- face Optical polish)
FWHMA<30 arcsec B/C/D <50 arcsec
Micropipe DensityA+≤1cm-2 A≤10cm-2 B≤30cm-2 C≤50cm-2 D≤100cm-2
Surface Orientation
On axis <0001>± 0.5°
Off axis 3.5° toward <11-20>± 0.5°
Primary flat orientationParallel {1-100} ± 5°
Primary flat length16.00 ± 1.70 mm
Secondary flat orientation Si-face:90° cw. from orientation flat ± 5°
C-face:90° ccw. from orientation flat ± 5°
Secondary flat length8.00 ± 1.70 mm
Surface FinishSingle or double face polished
PackagingSingle wafer box or multi wafer box
Usable area≥ 90 %
Edge exclusion1 mm

4H N-type or Semi-insulating SIC,5mm*5mm, 10mm*10mm WAFER SPECIFICATION : Thickness:330μm/430μm

4H N-type or Semi-insulating SIC,15mm*15mm, 20mm*20mm WAFER SPECIFICATION: Thickness:330μm/430μm

4H N-TYPE SiC, 2″(50.8mm)WAFER SPECIFICATION

SUBSTRATE PROPERTYS4H-51-N-PWAM-330 S4H-51-N-PWAM-430
DescriptionA/B Production Grade C/D Research Grade D Dummy Grade 4H SiC Substrate
Polytype4H
Diameter(50.8 ± 0.38) mm
Thickness(250 ± 25) μm (330 ± 25) μm (430 ± 25) μm
Carrier Typen-type
DopantNitrogen
Resistivity (RT)0.012 – 0.0028 Ω·cm
Surface Roughness< 0.5 nm (Si-face CMP Epi-ready); <1 nm (C- face Optical polish)
FWHMA<30 arcsec B/C/D <50 arcsec
Micropipe DensityA+≤1cm-2 A≤10cm-2 B≤30cm-2 C≤50cm-2 D≤100cm-2
Surface Orientation
On axis<0001>± 0.5°
Off axis4°or 8° toward <11-20>± 0.5°
Primary flat orientationParallel {1-100} ± 5°
Primary flat length16.00 ± 1.70) mm
Secondary flat orientationSi-face:90° cw. from orientation flat ± 5°
C-face:90° ccw. from orientation flat ± 5°
Secondary flat length8.00 ± 1.70 mm
Surface FinishSingle or double face polished
PackagingSingle wafer box or multi wafer box
Usable area≥ 90 %
Edge exclusion1 mm

4H N-TYPE SiC, 3″(76.2mm)WAFER SPECIFICATION

SUBSTRATE PROPERTYS4H-76-N-PWAM-330 S4H-76-N-PWAM-430
DescriptionA/B Production Grade C/D Research Grade D Dummy Grade 4H SiC Substrate
Polytype4H
Diameter(76.2 ± 0.38) mm
Thickness(350 ± 25) μm (430 ± 25) μm
Carrier Typen-type
DopantNitrogen
Resistivity (RT)0.015 – 0.028Ω·cm
Surface Roughness< 0.5 nm (Si-face CMP Epi-ready); <1 nm (C- face Optical polish)
FWHMA<30 arcsec B/C/D <50 arcsec
Micropipe DensityA+≤1cm-2 A≤10cm-2 B≤30cm-2 C≤50cm-2 D≤100cm-2
TTV/Bow /Warp<25μm
Surface Orientation
On axis<0001>± 0.5°
Off axis4°or 8° toward <11-20>± 0.5°
Primary flat orientation<11-20>±5.0°
Primary flat length22.22 mm±3.17mm
0.875″±0.125″
Secondary flat orientationSi-face:90° cw. from orientation flat ± 5°
C-face:90° ccw. from orientation flat ± 5°
Secondary flat length11.00 ± 1.70 mm
Surface FinishSingle or double face polished
PackagingSingle wafer box or multi wafer box
ScratchNone
Usable area≥ 90 %
Edge exclusion2mm

4H SEMI-INSULATING SiC, 3″(76.2mm)WAFER SPECIFICATION

(High Purity Semi-Insulating(HPSI) SiC substrate is available)

SUBSTRATE PROPERTYS4H-76-N-PWAM-330 S4H-76-N-PWAM-430
DescriptionA/B Production Grade C/D Research Grade D Dummy Grade 4H SiC Substrate
Polytype4H
Diameter(76.2 ± 0.38) mm
Thickness(350 ± 25) μm (430 ± 25) μm
Carrier Typesemi-insulating
DopantV
Resistivity (RT)>1E5 Ω·cm
Surface Roughness< 0.5 nm (Si-face CMP Epi-ready); <1 nm (C- face Optical polish)
FWHMA<30 arcsec B/C/D <50 arcsec
Micropipe DensityA+≤1cm-2 A≤10cm-2 B≤30cm-2 C≤50cm-2 D≤100cm-2
TTV/Bow /Warp<25μm
Surface Orientation
On axis<0001>± 0.5°
Off axis4°or 8° toward <11-20>± 0.5°
Primary flat orientation<11-20>±5.0°
Primary flat length22.22 mm±3.17mm
0.875″±0.125″
Secondary flat orientationSi-face:90° cw. from orientation flat ± 5°
C-face:90° ccw. from orientation flat ± 5°
Secondary flat length11.00 ± 1.70 mm
Surface FinishSingle or double face polished
PackagingSingle wafer box or multi wafer box
ScratchNone
Usable area≥ 90 %
Edge exclusion2mm

4H N-TYPE SiC, 4″(100mm)WAFER SPECIFICATION

SUBSTRATE PROPERTYS4H-100-N-PWAM-330 S4H-100-N-PWAM-430
DescriptionA/B Production Grade C/D Research Grade D Dummy Grade 4H SiC Substrate
Polytype4H
Diameter(100.8 ± 0.38) mm
Thickness(350 ± 25) μm (430 ± 25) μm
Carrier Typen-type
DopantNitrogen
Resistivity (RT)0.015 – 0.028Ω·cm
Surface Roughness< 0.5 nm (Si-face CMP Epi-ready); <1 nm (C- face Optical polish)
FWHMA<30 arcsec B/C/D <50 arcsec
Micropipe DensityA+≤1cm-2 A≤10cm-2 B≤30cm-2 C≤50cm-2 D≤100cm-2
TTV/Bow /Warp<45μm
Surface Orientation
On axis<0001>± 0.5°
Off axis4°or 8° toward <11-20>± 0.5°
Primary flat orientation<11-20>±5.0°
Primary flat length32.50 mm±2.00mm
Secondary flat orientationSi-face:90° cw. from orientation flat ± 5°
C-face:90° ccw. from orientation flat ± 5°
Secondary flat length18.00 ± 2.00 mm
Surface FinishSingle or double face polished
PackagingSingle wafer box or multi wafer box
ScratchNone
Usable area≥ 90 %
Edge exclusion2mm

4H N-type or semi-insulating SIC,5mm*5mm, 10mm*10mm WAFER SPECIFICATION: Thickness:330μm/430μm

4H N-type or semi-insulating SIC,15mm*15mm, 20mm*20mm WAFER SPECIFICATION:Thickness:330μm/430μm

a-plane SiC Wafer, size: 40mm*10mm,30mm*10mm,20mm*10mm,10mm*10mm,specs below:

6H/4H N type Thickness:330μm/430μm or custom

6H/4H Semi-insulating Thickness:330μm/430μm or custom

4H SiC,SEMI-INSULATING, 4″(100mm)WAFER SPECIFICATION

(High-Purity Semi-Insulating(HPSI) SiC substrate is available)

SUBSTRATE PROPERTYS4H-100-SI-PWAM-350 S4H-100-SI-PWAM-500
DescriptionA/B Production Grade C/D Research Grade D Dummy Grade 4H SiC Substrate
Polytype4H
Diameter(100 ± 0.5) mm
Thickness(350 ± 25) μm (500 ± 25) μm
Carrier TypeSemi-insulating
DopantV
Resistivity (RT)>1E5 Ω·cm
Surface Roughness< 0.5 nm (Si-face CMP Epi-ready); <1 nm (C- face Optical polish)
FWHMA<30 arcsec B/C/D <50 arcsec
Micropipe DensityA≤5cm-2 B≤15cm-2 C≤50cm-2 D≤100cm-2
TTV/Bow /WarpTTV<10μm;TTV< 25μm;WARP<45μm
Surface Orientation
On axis<0001>± 0.5°
Off axisNone
Primary flat orientation<11-20>±5.0°
Primary flat length32.50 mm±2.00mm
Secondary flat orientationSi-face:90° cw. from orientation flat ± 5°
C-face:90° ccw. from orientation flat ± 5°
Secondary flat length18.00 ± 2.00 mm
Surface FinishDouble face polished
PackagingSingle wafer box or multi wafer box
Scratches<8 scratches to 1 x wafer diameter with total cumulative length
CracksNone
Usable area≥ 90 %
Edge exclusion2mm

4H SiC,N-TYPE , 6″(150mm)WAFER SPECIFICATION

SUBSTRATE PROPERTYS4H-150-N-PWAM-350
DescriptionDummy Grade 2
Polytype4H
Diameter(150 ± 0.2) mm
Thickness(350 ± 25) μm
Carrier Typen-type
DopantNitrogen
Resistivity (RT)0.015 – 0.028Ω·cm
Surface Roughness< 0.5 nm (Si-face CMP Epi-ready); <1 nm (C- face Optical polish)
Micropipe DensityN/A
TTV≤30μm
Bow≤120μm
Warp≤150μm
Surface Orientation
Off axis4° toward <11-20>± 0.5°
Primary flat orientation<10-10>±5.0°
Primary flat length47.50 mm±2.50mm
Surface FinishDouble face polished
Edge exclusion3mm
PackagingSingle wafer box or multi wafer box

Please see below sub-catalogue:


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